Lecture Notes

Summer Term:

Lecture 1: Introduction

Lecture 2: Wafer substrate materials

Lecture 3: Deposition Processes I: CVD

Lecture 4: Deposition Processes II: PVD

Lecture 5: Doping of Silicon

Lecture 6: Metal plating (Galvanic deposition)

Lecture 7: Materials I (Silicon)

Lecture 8: Materials II (Si compound)

Lecture 9: Materials III - Metals

Lecture 10: Photolithography - I

Lecture 11: Photolithography - II

Lecture 12: Wet etching

Lecture 13: Dry etching

Lecture 14: CMP - Grinding

Lecture 15: Waferbonding

Lecture 16: Surface micromachining

Winter Term

Lecture 1: Introduction

Lecture 2: Signal-conversion principles for mechanical sensors

Lecture 3: Hot-Wire Anemometry

Lecture 4: Capacitive sensing – Electrostatic actuation

Lecture 5: Stress & strain in sensors and thermal drives

Lecture 6: Piezoelectric transducers

Lecture 7: Pressure sensors

Lecture 8: Inertial sensors

Lecture 9: Micro-Optics

Lecture 10: Optical MEMS - MOEMS

Lecture 11: Thermal sensing and actuation

Lecture 12: MEMS packaging

All lectures in one zip (40 MB)