course:

Silicon Technology I + II

type:

lecture + exercises

lecturer:

Heuberger , Bernt

semester:

SS+WS

hours per week:

2  each semester

ECTS credits:

2,5 each semester

content:

The semiconductor technology is concerned with the fabrication of semiconductor devices and integrated circuits. Because of their technical importance the methods for doping, layer modification and structure generation in highly integrated silicon-ICs are emphasized. To make clear the economic aspects of integration the historical development of the technology is treated in the lecture. The two parts of the course can be attended independently.
 

literature:

1. Widmann,Mader,Friedrich, Technology of Integrated Circuits, Springer 2000
2. Wolf,Tauber, Silicon Processing for the VLSI era, Lattice Press, 2nd ed. 1999                 3. Plummer,Deal,Griffin, Silicon VLSI Technology, Fundamentals, Practice and Modeling, Prentice Hall, 2000

requirements:

Master 2^nd semester

Prerequisites:
Bachelor; Hearing of the lecture "Electronic Materials".
Further required is basic familiarity with the physics of semiconductor  devices at the level of e.g.
Sze, Physics of Semiconductor Devices, [Chpts. 1,2,7,8].
The lecture follows the point of view of the textbook  "Plummer,Deal,Griffin, Silicon,VLSI Technology,Prentice Hall 2000" whose reading is highly recommended.
 

examination:

oral